AMHS for Semiconductor Fab.
High Density Reticle Stocker CDRX (Clean Depot Reticle/POD Stocker)
With shrinking design nodes, Reticle protection is required to reduce haze and crystal growing. CDRX is a combination storage system to store Reticle and Pod separately. It prevents the Reticle haze and the crystal growing by use of CDA and N2 Purging. In addition, the optional Anti-Seismic Function will guard Reticles from the breakage in case of earthquake.
| Cycle Time(s) | Input 60 sec. |
| Reticle Storage (Purging) | 1,920 cells |
| POD Storage (Purging Option) | 60 PODs |
| Reticle Storage by | Patented Reticle Storage Cell |
| Storage Cleanliness | ISO CLASS 1 |
| Anti-Seismic Function (Option) | SN:633gal, EW786gal (The Great East Japan Earthquake Requirements) |
