AMHS for Semiconductor Fab.


High Density Reticle Stocker CDRX (Clean Depot Reticle/POD Stocker)

With shrinking design nodes, Reticle protection is required to reduce haze and crystal growing. CDRX is a combination storage system to store Reticle and Pod separately. It prevents the Reticle haze and the crystal growing by use of CDA and N2 Purging. In addition, the optional Anti-Seismic Function will guard Reticles from the breakage in case of earthquake.


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Cycle Time(s) Input 60 sec.
Reticle Storage (Purging) 1,920 cells
POD Storage (Purging Option) 60 PODs
Reticle Storage by Patented Reticle Storage Cell
Storage Cleanliness ISO CLASS 1
Anti-Seismic Function (Option) SN:633gal, EW786gal (The Great East Japan Earthquake Requirements)


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