AMHS for Semiconductor Fab.
High Density Reticle Stocker CDRX (Clean Depot Reticle/POD Stocker)
With shrinking design nodes, Reticle protection is required to reduce haze and crystal growing. CDRX is a combination storage system to store Reticle and Pod separately. It prevents the Reticle haze and the crystal growing by use of CDA and N2 Purging. In addition, the optional Anti-Seismic Function will guard Reticles from the breakage in case of earthquake.
|Cycle Time(s)||Input 60 sec.|
|Reticle Storage (Purging)||1,920 cells|
|POD Storage (Purging Option)||60 PODs|
|Reticle Storage by||Patented Reticle Storage Cell|
|Storage Cleanliness||ISO CLASS 1|
|Anti-Seismic Function (Option)||SN:633gal, EW786gal (The Great East Japan Earthquake Requirements)|