AMHS for Semiconductor Fab.

Carrier Stocker

Temporary storage shelves in the clean room are intended to absorb a deviation in timing between the process completion on the current process equipment and the start of process on the next process equipment. We can provide a wide range of storage solutions to meet your needs, like stocker for storing carrier (FOUP or RSP), buffer before the process equipment (TS300) or Reticle stocker with high density storage and purge capability (CDRX).