AMHS for Semiconductor Fab.
Tool Front FOUP Buffer Tool Station TS300
The TS300 is a buffer equipment meant to be set over the load port of the process equipment. Tool Station can be set up on either a new or existing production line where the equipment complies with E15.1 SEMI Standard. Carriers (FOUP) can be buffered at the nearest position to the process equipment. Additionally, by setting up independent transfer units at each process equipment, it is possible to reduce the FOUP replacement time between the FOUP removal after process completion and FOUP supply to the next process, enabling improvement in the operation efficiency of the inspection equipment which now requires a shorter time to inspect.
– Maximum configurations 4 bays x 3 Levels for temporary storage
– N2 purging is available (Option)
– Easy removal and reinstallation for maintenance, taking less than 10 mins.
|Cycle Time (s)||15|
|Number of Buffer||4-12 FOUP|
|Install & Adjustment Time||360min|
|Tool Modification||Less (depend on the tool configuration)|